Switching Language

Please note that your current login session is only valid on the English site (letpub.com). You will not be signed in on other language versions of the site. If you wish to place an order, please return to the English site.

    Research Creative   My Account   Submit My Manuscript
Letpub, Scientific Editing Services, Manuscript Editing Service


Scientific Journal Selector


New Free Tool: Verity — Pre-Submission Manuscript Check
Automatically checks your manuscript across 34 criteria including structure, metadata, disclosures, and language issues before you submit to your target journal.
Try for Free →
  
  
-

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B


👁  47644 View(s)

 9 Review(s)  

 Open Access      SCIE      Official Website     Submission Website
 

*Average Peer Review
About 3.0 month(s)
*Competitiveness
Easy
CiteScore
0
CiteScore Rank
Subject Area Rank Percentile
N.A.
Link to PubMed Central (PMC)
https://www.ncbi.nlm.nih.gov/nlmcatalog?term=1071-1023%5BISSN%5D

Indexing (SCI collection)
Science Citation Index Expanded (SCIE)

Country/Area of Publication
UNITED STATES
Publication Frequency
Bimonthly
Publisher
A V S AMER INST PHYSICS

ISSN
1071-1023
E-ISSN
Year Publication Started
1991

Self-citation (2025-2026)
6.20%
Annual Article Volume
170
Gold OA Percentage
9.78%

Open Access Info
APC APC Waiver Other Charges
N/A N/A N/A
Journal Aim & Scope
Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.

Web of Science Quartiles
WOS Quartile: Q4

Quartiles By JIFCollectionQuartileRankPercentage
Category: ENGINEERING, ELECTRICAL & ELECTRONICSCIEQ4280/369
Category: NANOSCIENCE & NANOTECHNOLOGYSCIEQ4128/148
Category: PHYSICS, APPLIEDSCIEQ4148/191
Quartiles By JCICollectionQuartileRankPercentage
Category: ENGINEERING, ELECTRICAL & ELECTRONICSCIEQ4299/371
Category: NANOSCIENCE & NANOTECHNOLOGYSCIEQ4125/148
Category: PHYSICS, APPLIEDSCIEQ4154/191
*Crowdsourced data
  • Journals In The Same Subject Area
  • CiteScore Trends
  • Self Citation Trends
  • Annual Article Volume Trends
  • Journal Title h-index CiteScore
    PROCEEDINGS OF THE IEEE25060.30
    IEEE TRANSACTIONS ON PATTERN ANALYSIS AND MACHINE INTELLIGENCE32641.10
    IEEE TRANSACTIONS ON IMAGE PROCESSING24221.70
    IEEE TRANSACTIONS ON KNOWLEDGE AND DATA ENGINEERING14822.70
    IEEE SIGNAL PROCESSING MAGAZINE15520.80
    IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS FOR VIDEO TECHNOLOGY15418.10
    PROGRESS IN QUANTUM ELECTRONICS5819.70
    IEEE TRANSACTIONS ON FUZZY SYSTEMS17020.50
    EXPERT SYSTEMS WITH APPLICATIONS16217.00
    IEEE TRANSACTIONS ON INTELLIGENT TRANSPORTATION SYSTEMS11220.50
  • JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
    Predict CiteScore Trend：
    Steady Increase No Change Gradual Decline　 Refresh
 
    👁  47644 View(s)
    ☰  Review(s)        
 
 
 

Select your rating and start your review of JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

 

    Journals In The Same Field
    PROGRESS IN ENERGY AND COMBUSTION SCIENCE
    CiteScore: 87.50
    Nature Electronics
    CiteScore: 52.50
    Annual Review of Fluid Mechanics
    CiteScore: 43.30
    RENEWABLE & SUSTAINABLE ENERGY REVIEWS
    CiteScore: 36.80
    INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
    CiteScore: 35.30
    ARCHIVES OF COMPUTATIONAL METHODS IN ENGINEERING
    CiteScore: 34.80
    PROGRESS IN AEROSPACE SCIENCES
    CiteScore: 34.80
    International Journal of Extreme Manufacturing
    CiteScore: 29.30
    Applied Mechanics Reviews
    CiteScore: 28.30
    JOURNAL OF MANUFACTURING SYSTEMS
    CiteScore: 27.70



    © 2010-2026  ACCDON LLC 400 5th Ave, Suite 530, Waltham, MA 02451, USA
    Privacy • Terms of Servic